Four-wire orthogonal structure for accurate measurement of fluid velocity and wind flow direction using silicon micro-machining on silicon nitride membranes
نویسندگان
چکیده
Four-wire orthogonal structure for accurate measurement of fluid velocity and wind flow direction using silicon micro-machining on nitride membranes
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ژورنال
عنوان ژورنال: ????? ?????? ??? ? ????????? ?????
سال: 2023
ISSN: ['2676-5810', '2676-6086']
DOI: https://doi.org/10.52547/jiaeee.20.1.1